Research Summary
Professor Lin is currently the Interim President of Minghsin University of Science and Technology. He has previously served as the Chair of the Department of Mechanical Engineering, Dean of the College of Mechatronics, and Distinguished Professor and Vice President at National Taipei University of Technology. He later became the ninth president of Minghsin University of Science and Technology and continued to cultivate technical talent as a Chair Professor after stepping down. In 1998, he established the Diamond Research Team, focusing on the design and development of mechatronics integration and thin-film processing equipment. The team's research has achieved numerous significant outcomes, with more than a hundred papers published in domestic and international journals. He has been honored as a Fellow of the Taiwan Vacuum Engineering and a Corresponding Member of the Russian Academy of Engineering (Junior Academician).
Continuous breakthroughs and advancements in research have primarily focused on the study of Nanocarbon materials. The research team aims at developing processing techniques for Nanocarbon materials, with major achievements including the preparation processes and applications of Ultra Nano crystalline diamond (UNCD) films, Diamond-like carbon(DLC) films, Graphene, and Carbon Nanotubes in high-performance optoelectronic semiconductor devices and implantable biomedical sensors. Vacuum technology plays a crucial role in the development and research of thin-film processing equipment.
Currently, our research team has successfully developed:
1. A process to transfer the growth formula of Diamond-like carbon films from the laboratory to industrial plasma-enhanced chemical vapor deposition equipment, successfully synthesizing diamond-like carbon films with a size of up to 12 inches, and silica films of the same size using a room-temperature process without the need for Silane.
2. A pioneering model for spin field emission sources that combines the anomalous Hall effect structure with diamond-like carbon field emission.
3. Nanodiamond powder target technology that allows for sputtering of Diamond-like carbon films approaching diamond quality through a low-temperature sputtering process, without the need for oxygen and hydrogen gas during the process.
4. A successful low-temperature deposition technique for diamond-like carbon films on plastic substrates, effectively applied as a protective layer for flexible panels.
5. A successful process technology for Ultra Nano crystalline diamond films using low-temperature, low-pressure microwave plasma beams, applied in the preparation of ultraviolet sensors that exhibit good time response and stable reproducibility.
6. Development of process equipment for diamond coating, which enhances the performance of precision cutting tools.
The research team has mastered multiple key technologies and accumulated experience in industrial collaboration, not only developing technology but also training relevant technical personnel for both industry and academia. This is aimed at continuously strengthening Taiwan’s international advantage in the semiconductor field.